• PG

    Fine Ceramics(Advanced Ceramics)
    Ceramic Materials

    Yttria (Y2O3)

    A material with excellent corrosion resistance in a plasma environment
    material_yttria_main.jpg

    Yttria is a material with excellent plasma resistance. It is effective in reducing contamination by particles and impurities, which is desired for parts in manufacturing processes that use plasma such as semiconductor processing equipment.

    Important property :
    Plasma Resistance
    Corrosion Resistance

    Property

    material_yttria_table.jpg
    The values are typical material properties and may vary according to products configuration and manufacturing process.
    ＊1: All values for apparent density and bulk density are the same, except for the porous materials which lists apparent density only.

    Material Characteristics Table

    Product examples

    Customizable

    We have a wide range of technologies such as material technology, process technology, design technology, measurement/evalsuation technology, and integrated processes from materials to products in-house, so we can respond to various customizations. Please feel free to contact us first.
    PG